Preface. - 1 Introduction. - 1. 1 Why SOI ?. - 1. 2 Why Not Yet SOI ?. - 1. 3 Why an SOI Book?. - 2 Methods of Forming SOI Wafers. - 2. 1 SIMOX. - 2. 2 Wafer Bonding. - 2. 3 Zone-Melting Recrystallization. - 2. 4 Epitaxial Lateral Overgrowth. - 2. 5 Full Isolation by Porous Oxidized Silicon. - 2. 6 Silicon on Sapphire. - 2. 7 Silicon on Zirconia. - 3 SOI Devices. - 3. 1 Advanced CMOS and Bipolar Devices. - 3. 2 Radiation-Hardened Circuits. - 3. 3 High-Voltage Devices. - 3. 4 High-Temperature Devices. - 3. 5 Low-Power Applications. - 3. 6 Three-Dimensional Devices. - 3. 7 Transducers. - 3. 8 Innovative Devices. - 4 Wafer-Screening Techniques. - 4. 1 The Basis for Wafer Screening. - 4. 2 Surface Photovoltage. - 4. 3 Dual-Beam S-Polarized Reflectance. - 4. 4 Dual-Beam Optical Modulation. - 4. 5 Other Optical Methods. - 4. 6 Point Contact Pseudo-MOS Transistor. - 4. 7 Quick-Turnaround Capacitance. - 4. 8 Pinhole Detection. - 4. 9 Conclusion. - 5 Transport Measurements. - 5. 1 Four-Point Probe. - 5. 2 Spreading Resistance. - 5. 3 Hall Effect and Magnetoresistance. - 5. 4 Van der Pauw Measurements. - 5. 5 Photoconductivity. - 5. 6 PICTS. - 6 SIS Capacitor-Based Characterization Techniques. - 6. 1 Capacitance and Conductance Techniques. - 6. 2 Bias-Scan DLTS Technique. - 6. 4 Zerbst Method and Generation Lifetime. - 6. 5 MOS Capacitance Method. - 7 Diode Measurements. - 7. 1 CurrentVoltage Measurements in a PN Diode. - 7. 2 Differential Current/Capacitance Method. - 7. 3 Gated-Diode Measurements. - 7. 4 Deep-Level Transient Spectroscopy. - 8 Electrical Characterization of SOI Materials and Devices MOS Transistor Characteristics. - 9 Transistor-Based Characterization Techniques. - List of Symbols. Language: English